Endorsed Technology for
Semiconductor Equipment & Factory Automation

About Us

Built by a team of semiconductor equipment veterans, Endorsed Technology offers a broad portfolio of wafer handling automation and factory automation for semiconductor fabs.

Our robotic solutions and tool automation systems provide clean, high-accuracy, non-contact handling of wafers, regardless of wafer material, size or thickness, it is a perfect solution for wafer metrology and inspection OEM’s that require precise and contamination-free wafer handling!

Our factory automation solutions include regular and clean-room AGV/AMR to handle FOUP or SMIF pod load/unloading to/from equipment or integrated with wafer or reticle Stocker or AS/RS. Our AGV/AMR is a field proven solution and has been running for years in several global prominent semiconductor fabs.

Feel free to discuss with us your company's wafer handling or carrier handling needs, you can always find the solution with our standard or custom design product. We are here to help your company to be Industry 4.0 ready.

Wafer Handling Solution

Wafer-handling that is contamination-free

From 4"~12", silicon, glass or compound (SiC, GaN, GaAs), IGBT, MEMS wafer to reticle or other square substrate, thin or perforated (e.g. for TGV/CoPos), we specialize in edge grip wafer transferring or placement.

Non-contact Thin Warped Wafer Handling

Force-controlled edge gripping end effector or aligner is perfect for delicate Taiko, thin warped or perforated wafers. Also offer non-contact solution for 6" or 8" SiC wafer.

Macro & Micro Wafer Defect Visual Inspection

6" or 8" wafer; front, edge & back side inspection; notch or flat finding with opitonal ID reading; works with most microscopes

Wafer OM Loader for Macro & Micro Inspection

Non-contact Inspection/ Metrology Chuck

High precsion, force-controlled edge gripping chuck for inspecting normal, Taiko or thin warped wafers with opitonal rotation, flipping or notch/flat finding features

Wafer Packing System

Unpacking or packing 6" or 8" normal or thin warped wafer, contact or non contact handling type, auto detect wafer or interleave

Custom System Design

Standard or custom wafer sorter or EFEM (Equipment front End Module), dual wrist handling for fast swap, software-driven 6", 8" and 12" size change over, transporting wafer or panel with tray

Equipment Control Automation

Custom design sorter or EFEM drivers for LoadPort, Robot, Job scheduler, Recipe, and GUI per client's choice; software hand-shaking with client's tool host; fab host communication via E84 & SECS/GEM

AGV/AMR

The wheel for your AMHS needs

Working with our sister company, Chenlux Technology, and their technical partners, we offer full blown series of AGV (Automated Gudied Vehicle) and AMR (Autonomous Mobile Robots). We also provide warehouse handling system for pallet/rack etc., integrated with AGV Forklifter & AS/RS system.

Mobile Robot

Laser guided navigation, 1,200kg payload, configured for operation in clean room per clean room class 100 (ISO 5)

Low Profile AGV

This intelligent AGV is extremely low in design, moves under the load carriers to lift and transport them to the defined destination.

Safety First

Designed with Human Safe Concept - 4 laser scan sensors to cover 360° of the vehicle. Scan field auto adjusts with Mobile Robot' velocity

AGV with Forklift

Laser guided navigation. Up to 2,500kg payload, speed up to 1.80m/sec (empity), 1.66m/sec (loaded), position accuracy ±15mm

Application in Semiconductor Fabs

An intelligent AGV/AMR that meets your fab's most strict requirements!

6" or 8" SMIF Pod Transfer

4-SMIF per AGV, camera check QR code for accuracy positioning, 2 sets of Camera for 3D vision function, Load/unloading accuracy ±0.5mm

12" FOUP Transfer

The gripping device has multi safety protection: optic sensor to detect FOUP in position, 4 sets of contact switch to check FOUP displacement, electric gripper with constant force and position feedback

Fleet Management

The ﬂeet manager computes, determines and realizes the routing based on contour navigation. CAD based Editor, SLAM daten algorythm, accuracy ±10mm

Our Services

Semiconductor Equipment Automation

Custom equipment/ host end software development. Legacy software migration, integration and automation

Wafer Carrier Transport Automation

Customize solution for SMIF, FOUP and cassette with field proven component (AGV/ Collaborative robot), also integrated with your designated vendors' AS/RS or stocker

Display handling system application

Implement robotic automation for display handling that integrates with client's process equipment (such as sputtering system)

Endorsed Technology for Semiconductor Equipment & Factory Automation